Transmitting motion into a vacuum environment
Ferrofluid rotary vacuum feedthroughs transmit rotary motion into a vacuum chamber. The sealing mechanism relies on a magnetic fluid held in place by a permanent magnet. In thin film deposition, this creates a reliable barrier between the atmosphere and the process chamber. The integrity of this seal is non-negotiable for processes like Chemical Vapor Deposition (CVD) and Physical Vapor Deposition (PVD). These methods form the foundation of modern coating technology for devices ranging from solar panels to microelectronics.
Application demands in semiconductor and display manufacturing
Industry documentation shows specific application areas for these seals. They are used in semiconductor manufacturing for single-crystal silicon furnaces, where vacuum integrity is needed for high-temperature processes. The seals are also applied in CVD systems to maintain a leak-free environment for reactors. In PVD equipment, they provide precise sealing for thin-film deposition. Another major area is Flat Panel Display (FPD) production, which requires contamination-free processes. Photovoltaic production for solar panels is also a listed application.
The case for multiple independent shafts
A feedthrough with three non-coaxial shafts addresses a clear need for complex motion within a single vacuum port. This design can accommodate rotating, height-adjustable, and tilt-adjustable substrate holders. Some coating systems feature a planetary rotation stage for uniform film deposition. Having three independent drives in one compact unit saves valuable flange space on a vacuum chamber. It also simplifies sthe mechanical design by reducing the number of individual feedthroughs required.
Supporting precise and innovative fabrication
The goal of these systems is precise thin film deposition on specimens. This enables innovative fabrication of thin films for specific end products. Industry sources point to solar cells, batteries, and microelectronic devices. The equipment involved often includes features like a 7-inch colored touch-screen for programmable coating processes and USB data transfer. Optional add-ons for these systems can include RF sputtering capabilities and glow discharge plasma rods. Safety and reliability are supported by certifications like CE and global product liability coverage.
We provide related feedthroughs and seals for these demanding vacuum applications.